Lam Research 810-015987-003 Semiconductor Equipment PCB Assembly

Product Description
810-015987-003 is a printed circuit board assembly manufactured by Lam Research, designed for Lam plasma etch semiconductor wafer processing tools. This data acquisition and interface control board is installed in the equipment control chassis. It collects analog and digital signals from chamber sensors, processes real-time data, and implements bidirectional communication between the main system controller and on-site actuators including gas valves and vacuum components. The PCB assembly is fully assembled with electronic components, produced under strict ESD control and factory functional burn-in testing. It serves as OEM spare replacement part for semiconductor fab etch production tools.

Key Functions

• High-precision data acquisition and signal conditioning from pressure, temperature and gas flow sensors
• Digital input & output control for pneumatic valves, vacuum interlock and chamber actuators
• Real-time data processing and command exchange with the main tool controller
• Built-in hardware self-diagnosis for circuit fault detection and alarm reporting
• ESD protection and anti-vibration design suitable for cleanroom fab environment
• Standard rack slot mounting inside Lam plasma etcher control cabinet
• Pre-assembled PCB assembly for direct replacement during on-site maintenance

Application Scenarios

• Lam Research plasma etching wafer processing semiconductor equipment
• Semiconductor cleanroom fab equipment maintenance and spare parts swapping
• Process chamber sensor monitoring and gas & vacuum control subsystem
• Fab tool refurbishment, upgrade and spare inventory backup

FAQ

Q: Who manufactures 810-015987-003?
A: Lam Research, USA semiconductor equipment OEM.

Q: What is the main purpose of this PCB assembly?
A: Collect sensor signals, process data, control field actuators and communicate with the main tool controller.

Q: What type of tools is this board fitted to?
A: Lam plasma etch wafer processing tools in semiconductor fabrication plants.