Lam Research 810-800256-107 Semiconductor Equipment PCB Assembly

Product Description
810-800256-107 is a printed circuit board assembly from Lam Research, deployed in Lam plasma etch semiconductor wafer processing tools. This VME form factor control card serves as a core communication and signal processing board within the tool controller chassis. It manages data transmission between the main CPU and multiple peripheral subsystems, including RF power supply, gas delivery, vacuum and motion control modules. The assembly is fully populated with electronic components, manufactured with strict ESD control and factory burn-in testing. It is used as OEM spare replacement part for semiconductor fab production equipment.

Key Functions

• VME bus high-speed data communication between main controller and peripheral subsystems
• Command forwarding and status feedback for RF generator, gas and vacuum control units
• Digital signal processing and real-time data buffering for process control loop
• On-board hardware self-diagnosis to detect circuit faults and report alarm status
• ESD protection and anti-vibration design to meet cleanroom operating requirements
• Standard VME rack slot installation inside Lam etcher equipment cabinet
• Pre-assembled PCB assembly for direct swap during equipment maintenance

Application Scenarios

• Lam Research plasma etching wafer processing semiconductor tools
• Semiconductor cleanroom fab equipment maintenance and spare parts replacement
• Process tool main control and peripheral subsystem communication
• Fab tool refurbishment, upgrade and spare inventory backup

FAQ

Q: Who manufactures 810-800256-107?
A: Lam Research, USA semiconductor equipment OEM.

Q: What bus architecture does this PCB adopt?
A: VME bus architecture, installed in VME rack chassis of Lam etch tools.

Q: What is the main purpose of this board?
A: Realize high-speed communication and data exchange between main controller and peripheral subsystems.