LAM Research 810-810480-001 VME PCB Control Card

Product Description
810-810480-001 is a VME bus printed circuit board manufactured by Lam Research, designed for Lam semiconductor etch and thin-film deposition processing equipment. It serves as the core master control communication board inside the machine controller, adopting VME64 industrial bus architecture. This PCB is responsible for inter-subsystem data transmission, signal distribution, power routing and slot expansion. It provides unified hardware interface for RF control, vacuum monitoring, motion control and gas flow acquisition boards, strictly following Lam original hardware specifications. The board undergoes burn-in and EMC testing before factory delivery, widely used as spare replacement part for semiconductor fabrication tools.

Key Functions

• VME64 bus interface, high-speed data exchange between sub-systems
• Signal distribution and power allocation for multi functional slot expansion
• Interface with RF generator, vacuum sensor, motion and gas control modules
• On-board FPGA and memory for local signal processing and data buffering
• Built-in hardware self-diagnosis for circuit status monitoring and fault reporting
• Standard VME rack mount form factor for Lam semiconductor process tools
• Wide operating temperature with anti-vibration design for fab environment

Application Scenarios

• Lam Research plasma etcher semiconductor wafer processing equipment
• Thin film deposition tools in semiconductor fabrication factory
• Fab equipment maintenance, spare parts replacement and system upgrade
• Wafer manufacturing process control subsystem communication

FAQ

Q: What is the manufacturer of 810-810480-001?
A: Lam Research, a leading semiconductor equipment supplier from USA.

Q: What bus standard does this PCB use?
A: VME64 industrial bus.

Q: What kind of equipment is it installed on?
A: Lam plasma etching and thin-film deposition wafer processing machines.