Lam Research 810-017388-001 Semiconductor Equipment PCB Assembly

Product Description
810-017388-001 is a printed circuit board assembly manufactured by Lam Research, used for Lam plasma etch semiconductor wafer processing tools. This PCB assembly is a high-speed interface control board inside the equipment controller chassis. It handles real-time signal transmission, analog/digital signal conversion and command interaction between the main control unit and chamber subsystems, including gas delivery, pressure monitoring and actuator control. The board is fully assembled with electronic components, produced under strict ESD management and factory burn-in test. It is installed in the rack cabinet of Lam etch tools and serves as OEM spare replacement part for semiconductor fab production equipment.

Key Functions

• Real-time analog signal acquisition and conditioning from chamber pressure, temperature and flow sensors
• Digital I/O control for chamber valves, vacuum interlock and related actuators
• High-speed data communication and command exchange with the main system controller
• On-board hardware self-diagnosis for circuit fault detection and alarm reporting
• ESD protection and anti-vibration design to satisfy cleanroom operating environment
• Standard rack slot mounting inside Lam plasma etcher control cabinet
• Pre-assembled PCB for direct replacement during on-site equipment maintenance

Application Scenarios

• Lam Research plasma etching wafer processing semiconductor equipment
• Semiconductor cleanroom fab equipment maintenance and spare parts swapping
• Process chamber monitoring, gas and vacuum control subsystem
• Fab tool refurbishment, upgrade and spare inventory backup

FAQ

Q: Who manufactures 810-017388-001?
A: Lam Research, USA semiconductor equipment OEM.

Q: What equipment is this PCB used on?
A: Lam plasma etch wafer processing tools in semiconductor fabrication plants.

Q: What is the main function of this assembly?
A: Collect chamber sensor signals, control field actuators and communicate with the main tool controller.