AMAT 0010-23715 PMAX Emissometer Assembly

Product Brief Description

AMAT 0010-23715 is the PMAX Emissometer Assembly developed for Applied Materials RTP rapid thermal processing semiconductor equipment. It performs real-time measurement of wafer emissivity and surface temperature during high-temperature wafer processing, feeding precise optical measurement data back to the system for closed-loop thermal control. This critical semiconductor spare component is available as fully tested surplus and refurbished units for maintenance of existing RTP process chambers.

Product Features

• High-precision optical sensing for wafer emissivity and temperature measurement inside RTP chamber
• Integrated optical sensor, mounting bracket and signal transmission assembly
• Real-time signal feedback to host controller for accurate closed-loop thermal regulation
• Vacuum and high-temperature resistant construction to adapt semiconductor process environment
• Low optical drift design, ensuring stable performance for continuous wafer batch production
• Standard mechanical interface for quick disassembly and field replacement
• Refurbished units undergo strict optical calibration and functional testing before delivery

Application Scenarios

• Applied Materials RTP rapid thermal processing semiconductor manufacturing tools
• Wafer rapid thermal annealing, oxidation and thin film deposition processes
• Semiconductor fab chamber maintenance and precision component replacement
• 200mm and 300mm wafer thermal process control production lines
• Fab equipment overhaul, emergency spare backup and hardware retrofit

FAQ