LAM 810-099175-012 VME Analog I/O Board

Product Description

The 810-099175-012 is a 6U VME bus high-precision analog input & output board for Lam Research 2300 / Alliance series plasma etch semiconductor equipment. It samples analog signals such as pressure, flow, temperature and RF power, and outputs analog setpoints for closed-loop process control. It is responsible for stable regulation of chamber process parameters during wafer etching, and is a critical spare card for Lam etcher control racks.

Features

• Part No: 810-099175-012, Brand: LAM Research
• 6U VME form factor analog I/O (AIO) board for semiconductor process tools
• Multi-channel high-resolution ADC and DAC for process loop control
• High-speed sampling for real-time gas, pressure and RF control loops
• Built-in channel diagnostics for over-range, open and short circuit faults
• Conformal coating, EMC optimized for cleanroom cabinet environment
• Front panel LED indicators for power, run, communication and channel alarm
• Revision upgrade: 012 is improved version compared with 001, 005, 010 with better stability and anti-interference performance
• Calibration and diagnostic via Lam tool host software

Applications

• Semiconductor fab plasma etching equipment VME control rack
• Chamber pressure, mass flow, temperature and RF power closed-loop control
• Process recipe analog setpoint output and real-time parameter acquisition
• LAM 2300 / Alliance etcher maintenance, spare replacement and retrofit
• Wafer fab spare parts inventory for plasma process tools

FAQ

Q: What is the difference between 810-099175-010 and 810-099175-012?
A: 012 is the later upgraded revision, optimized circuit design, higher conversion accuracy and stronger EMI suppression for 300mm wafer process.

Q: Which Lam equipment is it compatible with?
A: Mainly used for Lam 2300 series and Alliance plasma etching platforms.

Q: Is this board discontinued?
A: This is legacy semiconductor tool hardware, original production stopped, supplied as surplus, refurbished and tested spare parts only.

Q: Can it run independently?
A: No, it must be installed in the VME rack and work with the main controller and tool process software.