LAM 810-049000-108 Semiconductor System Control Board

Product Description

The 810-049000-108 is a LAM Research control PCB board for semiconductor plasma processing equipment. It is responsible for equipment logic control, signal communication, and interlock management between the host controller and on-site actuators, sensors, RF subsystems and gas modules. It transmits recipe commands and uploads real-time status and fault data, being an essential control spare part for LAM etching platforms.

Features

• Part No: 810-049000-108, Brand: LAM Research
• Digital control and communication interface board for LAM semiconductor process tools
• Handles recipe execution, device interlock and fault signal transmission
• Multi-channel digital I/O and serial communication interfaces for subsystem interaction
• Built-in watchdog circuit to prevent system crash during wafer processing
• Conformal coating, designed for cleanroom cabinet environment with EMC protection
• Standard VME form factor for rack installation inside the etching tool
• Front panel LED indicators for power, run, communication and fault alarm
• Calibration and parameter configuration via LAM factory host software

Applications

• Semiconductor fab plasma etching equipment control rack
• Wafer process recipe management and safety interlock monitoring
• RF generator, gas box, vacuum subsystem communication coordination
• LAM etcher maintenance, spare replacement and equipment retrofit
• Semiconductor manufacturing spare parts inventory for chip fabs

FAQ

Q: What is the revision difference for 810-049000 series?
A: The suffix 108 is the hardware revision, fixing stability issues compared with older revisions such as 104, 106.

Q: What LAM equipment does this board fit?
A: It is matched with LAM series plasma etch process platforms for wafer fabrication.

Q: Is this board discontinued?
A: This is legacy semiconductor tool hardware, original production stopped, supplied as surplus, refurbished and tested spare parts only.

Q: Can it run independently?
A: No, it must be installed in the dedicated tool rack and cooperate with the main controller and process software.