Lam Research 810-017034-005 VME Processor PCB Assembly

Product Description
810-017034-005 is a VME bus processor board manufactured by Lam Research, used for Lam plasma etch semiconductor wafer processing tools. This VME CPU card serves as the core computing unit of the tool controller, adopting 68030 processor architecture. It executes process control logic, runs tool operating software, handles data processing and communication tasks between all peripheral sub-modules. Fully assembled with memory and interface chips, the board is produced with strict ESD control and factory functional burn-in testing. It is installed in the VME rack chassis and acts as OEM spare replacement component for semiconductor fab etch production tools.

Key Functions

• 68030 processor core, main computing and program execution for etch tool controller
• VME bus master control, managing data transmission with all peripheral VME slave boards
• Real-time process algorithm calculation, recipe execution and wafer processing sequence control
• Data logging, alarm handling and host software communication
• On-board self-diagnosis for CPU, memory and bus interface fault detection
• ESD protection and anti-vibration design to meet cleanroom fab operating requirements
• Standard VME rack slot mounting inside Lam plasma etcher control cabinet
• Pre-assembled PCB assembly for direct swap during equipment maintenance

Application Scenarios

• Lam Research plasma etching wafer processing semiconductor equipment
• Semiconductor cleanroom fab equipment maintenance and spare parts replacement
• Main VME controller unit of plasma etch process tools
• Fab tool refurbishment, upgrade and spare inventory backup

FAQ

Q: Who manufactures 810-017034-005?
A: Lam Research, USA semiconductor equipment OEM.

Q: What is this board?
A: It is a VME processor CPU board with 68030 core for Lam etcher controller.

Q: What is its main function?
A: Run tool control recipes, manage VME bus communication and execute real-time process control.