Product Brief Description

The MKS 627B1TBD1B is a high-precision Baratron capacitance manometer absolute pressure transducer with 1 Torr full-scale measurement range. It utilizes capacitance diaphragm sensor technology to deliver highly accurate, repeatable vacuum pressure readings independent of gas type. Built for semiconductor and vacuum process environments, this transducer outputs analog pressure signals to control systems, serving as a key monitoring component for low-pressure vacuum process chambers.

Product Features & Functions

• 1 Torr full scale absolute vacuum pressure measurement, ±0.25% FS high accuracy
• Baratron capacitance diaphragm technology, gas-type independent pressure reading
• Fast response time less than 10ms for real-time vacuum process monitoring
• Stable analog signal output, compatible with PLC, DCS and process controllers
• Corrosion-resistant all-metal wetted parts for clean vacuum applications
• Integrated temperature compensation to minimize thermal measurement drift
• Compact stainless steel body, easy chamber mounting and field calibration

Application Scenarios

• Semiconductor wafer fabrication: Etch, CVD, PVD vacuum chamber pressure monitoring
• Thin film deposition and sputtering vacuum process control
• High vacuum laboratory research and analytical instrument systems
• Industrial vacuum coating, freeze drying and degassing equipment
• Vacuum equipment maintenance, spare replacement and system upgrade

Frequently Asked Questions