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Phone: +86 18059884790
E-mail: plc66@qq.com
Add: fujian xiamen
- Warehouse: Spot
- Warranty： 365 days
- Quality: Original module
- Condition： New
- Shipping method: Courier delivery
- Contact person: LI MING
- Contact number: +86 18059884790
- WeChat：18059884790
- E-mail: plc66@qq.com
AMAT 0190-37684 Vacuum Pressure Monitoring Board
Product Brief Description
AMAT 0190-37684 is a vacuum pressure monitoring control board built for Applied Materials Centura and Endura semiconductor cluster tools. It collects real-time pressure signals from vacuum gauges inside the process chamber, converts analog pressure data into digital signals and communicates with the main system controller. The board maintains precise vacuum closed-loop control for wafer processing and triggers alarms once pressure deviates from recipe setpoints. We supply fully tested surplus and refurbished units for fab chamber maintenance and equipment overhaul.
Product Features
- Multi-channel pressure signal acquisition for different vacuum gauge sensors
- High precision analog-to-digital conversion for accurate chamber vacuum measurement
- Real-time data transmission to system VME controller and recipe pressure interlock protection
- Onboard LED indicators for power status, channel activity and pressure fault alerts
- Electromagnetic shielding PCB design, stable operation under plasma and high noise environment
- Standard plug-in card form factor, easy to install and replace in equipment control rack
- Refurbished boards pass signal calibration, continuity test and communication verification before cleanroom packaging
Application Scenarios
- Applied Materials Centura and Endura semiconductor cluster processing platforms
- Wafer PVD, CVD and plasma etch thin-film manufacturing processes
- 200mm / 300mm wafer fab vacuum chamber pressure monitoring subsystem
- Semiconductor tool preventive maintenance and control board replacement
- Emergency spare backup and hardware retrofit for legacy process modules
FAQ
Q1: Which AMAT equipment does 0190-37684 match?
A1: It is designed for AMAT Centura and Endura cluster tools. Confirm chamber model, backplane and hardware revision before purchase.
Q2: What are common failure symptoms of this pressure monitoring board?
A2: Typical faults include inaccurate pressure readings, pressure signal loss, recipe abort and vacuum interlock errors, caused by circuit aging or connector contamination.
Q3: What safety operations are required for replacement?
A3: Power off the whole equipment and wait for full discharge. Only certified cleanroom technicians can perform disassembly and installation.
Q4: What commissioning items are needed after installation?
A4: Pressure channel test, vacuum gauge calibration, interlock function verification and wafer process qualification must be completed.
Q5: What warranty do you provide for this AMAT spare part?
A5: Our fully tested refurbished AMAT 0190-37684 comes with standard warranty. Contact us for detailed warranty terms.
