Product Description

Agilent 5517DL/039/300 (now Keysight) is a high-speed He-Ne laser head for laser interferometer measurement systems. Option 039 provides 9mm beam diameter and higher output power, while option 300 features 5 MHz reference frequency. It delivers ultra-precise wavelength reference for high-velocity stage positioning, widely used in semiconductor lithography and FPD manufacturing.

Product Features

• Nominal wavelength 632.99137 nm, excellent wavelength stability ±0.002 ppm in 1 hour
• Max linear velocity up to 1329 mm/s, reference frequency 5 MHz (Option 300)
• Option 039: 9 mm beam diameter with enhanced optical power
• Class II laser, MTBF over 50,000 hours, total measurement range up to 40 meters
• Power supply: +15V / -15V DC, built-in thermal stabilization control
• 45-minute warm-up period with fan ventilation, weight 3.2 kg

Application Scenarios

• Semiconductor lithography stepper and scanner position feedback
• Flat panel display FPD exposure and inspection equipment
• High-precision CNC machine tool laser calibration
• Coordinate measuring machines and ultra-precision motion stages
• Legacy Agilent / Keysight interferometer system spare replacement

FAQ