1. Product Description

WOODWARD 8901-067 is a standard multi-pair shielded signal cable assembly developed for LAM Research semiconductor process equipment, used for interconnection between IO control boards, chamber sensors and solenoid valves.

Model Code Explanation: - 8901: Standard signal harness series for LAM process chamber internal wiring - 067: Specification code defining wire gauge, shielding structure, connector type and fixed length

This cable adopts 24AWG stranded tin copper conductors with PFA high-temperature, low-outgassing insulation. It features dual-layer shielding (aluminum foil inner shield + braided copper outer shield) to resist high-frequency plasma EMI inside etching and deposition cabinets. Equipped with molded D-Sub connectors on both ends with reinforced strain relief to prevent wire breakage under long-term mechanical vibration.

Core Specifications: 1. Wire: 24AWG multi-strand tin-plated copper, multiple twisted signal pairs 2. Insulation: PFA fluoropolymer, resistant to corrosive process gas vapor 3. Shielding: Double-layer full coverage shielding with dedicated drain wire for single-point grounding 4. Operating Temperature: -20°C ~ 125°C 5. Connector: Molded high-density D-Sub industrial plug, anti-dust and anti-humidity 6. Certification: UL, RoHS, semiconductor low-outgassing cleanroom certification

2. Core Product Functions

• Stable Digital/Analog Signal Transmission Transmit low-voltage feedback signals from chamber limit sensors, pressure transducers and optical endpoint detectors, and deliver drive signals to gas & vacuum solenoid valves without signal distortion.
• Strong Anti-EMI Interference Performance Double-layer shielding eliminates high-frequency RF noise generated by plasma power supplies, avoiding false safety interlock alarms caused by signal jitter.
• High Temperature & Chemical Corrosion Resistance PFA insulation withstands continuous high temperature near process chambers and trace corrosive etchant vapors, preventing insulation aging, cracking and short-circuit risks.
• Cleanroom Low-Outgassing Design Low-VOC halogen-free material avoids particle and organic contamination of wafer processing environment, meeting strict semiconductor fab production standards.
• Vibration Resistant Molded Connector Assembly Integrated molded strain relief protects internal wires from repeated bending and cabinet vibration, ensuring stable pin contact during long-term continuous production.
• Ground Loop Suppression Independent shield drain wire supports single-point cabinet grounding, effectively eliminating ground loop drift and intermittent signal loss faults.

3. Typical Application Scenarios

• LAM ICP Plasma Etching Equipment Interconnection wiring between main IO drive boards and process chamber vacuum gate valves, endpoint optical sensors.
• PVD / CVD Thin Film Deposition Tools Signal harness for precursor gas solenoid valves and chamber pressure monitoring sensors.
• Load Lock Wafer Transfer Subsystems Safety interlock cable for chamber door limit switches and robot position feedback sensors.
• Plasma Ashing & Photoresist Stripping Machines Control wiring for purge gas valves inside high-temperature process cabinets.
• Semiconductor Wet Clean Auxiliary Control Cabinets Interconnection cable for chemical dosing pump sensors and isolation valves.

4. Common Faults & Troubleshooting Solutions

5. Import & Compliance Document Information

1. Required customs documents: Certificate of Origin (COO), Certificate of Conformity (COC) 2. SDS/MSDS safety data sheet for low-outgassing cable materials 3. Factory outgoing electrical continuity test report 4. HS Code: 85447000 Shielded insulated electrical cable assemblies 5. Country of Origin: United States; Gross Weight varies based on fixed length 6. Lead Time: In stock 1~3 working days; custom length order 3~6 weeks 7. Matching accessory: Anti-static storage bag, D-Sub connector dust cap