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Phone: +86 18059884790
E-mail: plc66@qq.com
Add: fujian xiamen
- Warehouse: Spot
- Warranty： 365 days
- Quality: Original module
- Condition： New
- Shipping method: Courier delivery
- Contact person: LI MING
- Contact number: +86 18059884790
- WeChat：18059884790
- E-mail: plc66@qq.com
INFICON 0190-51546 REV03 Vacuum Gauge Controller Board
Product Brief Description
INFICON 0190-51546 REV03 is a high-precision vacuum gauge controller board customized for Applied Materials semiconductor cluster tools. It works cooperatively with INFICON vacuum transducers to monitor chamber vacuum pressure, convert sensor signals and communicate measurement data to the main equipment controller. This board provides real-time vacuum monitoring and interlock protection for wafer process chambers. We supply fully tested surplus and refurbished units for semiconductor fab maintenance and chamber retrofit.
Product Features
- Multi-channel signal input, compatible with INFICON vacuum gauges for wide-range pressure detection
- High precision signal conversion, delivers stable and repeatable vacuum pressure readings
- Digital communication interface for data exchange with AMAT tool main control system
- Built-in vacuum interlock logic, triggers alarm and process stop when pressure exceeds recipe limits
- Onboard LED status indicators for power supply, channel status and fault diagnostics
- EMC shielding PCB design, anti-interference for plasma and high electromagnetic noise environment
- Refurbished boards pass signal calibration, continuity test and communication verification before cleanroom packaging
Application Scenarios
- Applied Materials Centura, Endura semiconductor cluster process platforms
- Wafer PVD, CVD and plasma etching thin-film manufacturing processes
- 200mm / 300mm wafer fab vacuum chamber pressure monitoring subsystem
- Semiconductor equipment preventive maintenance and vacuum control board replacement
- Emergency spare backup and hardware upgrade of legacy process modules
FAQ
Q1: What equipment is INFICON 0190-51546 REV03 suitable for?
A1: It is matched for AMAT Centura and Endura cluster tools. Please confirm chamber model, vacuum gauge type and hardware revision before purchase.
Q2: What are common failure symptoms of this vacuum controller board?
A2: Typical faults include unstable pressure readings, no vacuum signal output, chamber interlock triggering, recipe abort, caused by circuit aging or connector contamination.
Q3: What safety rules should be followed during replacement?
A3: Power off the whole tool and wait for complete discharge. Only certified cleanroom technicians are permitted to carry out disassembly and installation.
Q4: What commissioning is required after installing this board?
A4: Vacuum channel test, gauge calibration, interlock function validation and wafer process qualification must be completed.
Q5: What warranty do you offer for this INFICON spare part?
A5: Our fully tested refurbished INFICON 0190-51546 REV03 comes with standard warranty. Contact us for detailed warranty terms.
