AMAT 0040-96157 Precision Chamber Mechanical Component

Product Brief Description

AMAT 0040-96157 is a precision machined mechanical spare part for Applied Materials Centura and Endura semiconductor cluster tools. It acts as a positioning and support component inside the vacuum chamber, maintaining accurate wafer positioning and structural stability during wafer processing. Manufactured with high-grade alloy and special surface treatment, it can endure high vacuum, thermal cycling and plasma environment. We supply fully cleaned, inspected surplus and refurbished units for semiconductor fab preventive maintenance.

Product Features

• Micron-level machining tolerance to guarantee precise wafer positioning inside process chamber
• High vacuum compatible material, works under vacuum level up to 10^-7 Torr
• Hard anodized surface treatment, resisting plasma corrosion and thermal shock
• Low outgassing material formula to reduce particle contamination and protect wafer yield
• Stable mechanical performance under repeated high and low temperature cycling
• Standard mounting holes for simple installation and replacement on chamber hardware
• Refurbished parts go through strict dimensional inspection, particle test and Class 100 cleanroom packaging before shipment

Application Scenarios

• Applied Materials Centura & Endura semiconductor cluster processing platforms
• Wafer PVD, CVD and plasma etch thin-film manufacturing processes
• 200mm / 300mm wafer fab vacuum chamber preventive maintenance
• Semiconductor chamber overhaul, worn mechanical support component replacement
• Fab emergency spare backup and hardware retrofit of old process modules

FAQ