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PLC/DCS module-NEWS
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Contact: YMGK Industrial Control
Phone: +86 18059884790
E-mail: plc66@qq.com
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Zygo ZMI-4004 Interferometer Board--KIMI
- Warehouse: Spot
- Warranty： 365 days
- Quality: Original module
- Condition： New
- Shipping method: Courier delivery
- Contact person: LI MING
- Contact number: +86 18059884790
- WeChat：18059884790
- E-mail: plc66@qq.com
Product Description
Zygo ZMI-4004 4-Axis VME64x Displacement Measuring Interferometer Board
4-Axis Parallel Metrology | 10 MHz Data Rate | VME64x/HS-Serial | Sub-Nanometer Resolution | Semiconductor Lithography/Metrology
1. Core Product Overview
The Zygo ZMI-4004 is a 4-axis VME64x displacement measuring interferometer (DMI) board for semiconductor lithography, precision stage metrology, and nanometer-scale position feedback, delivering sub-nanometer resolution (0.16 nm) and 10 MHz data rate for 4 parallel measurement axes. It integrates with Zygo 7702/7712/7714/7724 laser heads, using interferometry to calculate linear/angular displacement with cyclic error reduction (patented) for DMI nonlinearity elimination. The 6U VME64x board supports Parallel VME and High-Speed Serial (HS-Serial) interfaces, with real-time synchronization (<100 ns) for multi-axis stage control, ideal for next-generation lithography (NGL) and semiconductor test equipment requiring nanometer-level overlay accuracy. It operates in -10°C~+55°C environments, with a 6U VME form factor for modular VME chassis integration, and includes on-board diagnostics for laser/channel health monitoring.
• Core Role: 4-axis displacement metrology; sub-nanometer feedback; stage position control; cyclic error reduction; lithography overlay optimization • Model Info: ZMI-4004 (Zygo DMI); 4-axis; 6U VME64x; 10 MHz; sub-nanometer resolution; P/N: 8020-0500-01 • Key Specs: 0.16 nm resolution; 10 MHz data rate; 4 axes; VME64x/HS-Serial; -10°C~+55°C; 7702/7712/7714/7724 laser compatibility • Reliability: On-board diagnostics; cyclic error reduction; laser head redundancy; 50,000+ hr laser lifetime; 100,000-hour MTBF
2. Key Technical Specifications
| Parameter | Specification |
|---|---|
| Measurement Axes | 4 independent axes; linear/angular displacement; 0.16 nm resolution (10 MHz data rate) |
| Laser Compatibility | Zygo 7702, 7712, 7714, 7724 laser heads; >1.35 mW output; 20 MHz split frequency; 0.5 ppb (3σ) vacuum wavelength stability |
| Interface | 6U VME64x; Parallel VME (32/64-bit); High-Speed Serial (HS-Serial); real-time sync (<100 ns) |
| Performance | 0.16 nm resolution; 10 MHz data rate; cyclic error reduction (≤0.1 nm); velocity: 0–2 m/s (linear) |
| Power | VME bus-powered (5V/12V); 25W max power consumption; reverse-polarity protected |
| Environment | -10°C~+55°C; 5–95% non-condensing; IP20; IEC 721-3-3 Class 3C2 (optional) |
| Mechanical | 6U VME64x (233×160mm); plug-in VME chassis; 1.5 kg; front-panel LED diagnostics (Power: green; Laser: amber; Fault: red) |
3. Measurement Principle & Cyclic Error Reduction
The ZMI-4004 uses optical interferometry: laser light splits into reference and measurement beams, with interference fringes detected to calculate displacement (1 fringe = λ/2, λ=633 nm). Its patented cyclic error reduction automatically eliminates DMI’s inherent nonlinearity (≤0.1 nm), critical for nanometer-level overlay accuracy in lithography. It measures linear (X/Y/Z) and angular (θx/θy/θz) displacement, with 4 axes supporting simultaneous X/Y/θx/θy feedback for stage control. On-board diagnostics monitor laser power, fringe amplitude, and channel health, triggering alarms via front-panel LEDs and a fault relay for remote monitoring. The board also includes a test mode for internal signal validation, ensuring measurement integrity during operation.
• Measurement Principle: Optical interferometry; fringe counting; λ/2 resolution (316.5 nm/fringe); cyclic error reduction (≤0.1 nm) • Axis Support: 4 parallel axes; linear/angular; X/Y/Z/θx/θy/θz (configurable); real-time sync (<100 ns) • Diagnostics: Laser power monitoring; fringe amplitude; channel fault detection; LED status (Power/Amber/Alarm/Fault); fault relay • Calibration: Cyclic error reduction (auto); laser wavelength calibration; axis alignment; test mode validation
4. Interface Protocols & System Integration
The ZMI-4004 uses a 6U VME64x form factor for modular integration into VME chassis, supporting Parallel VME (32/64-bit) and HS-Serial for high-speed data transfer (10 MHz) and real-time synchronization (<100 ns) with motion controllers. It connects to Zygo laser heads via fiber-optic cables, with plug-in terminals for power, communication, and I/O (relay outputs for alarms). Configuration is done via Zygo DMI Software (Windows) for axis setup, cyclic error reduction enable, data rate adjustment, and diagnostic threshold setting. It integrates with lithography tools (e.g., Nikon NSR FX-601F) and semiconductor test equipment, complying with SEMI standards for semiconductor manufacturing, with a 12-month Zygo warranty and global technical support.
• Interfaces: 6U VME64x; Parallel VME (32/64-bit); HS-Serial; fiber-optic laser input; relay alarm outputs • Configuration: Zygo DMI Software; axis mapping; cyclic error reduction; data rate (10 MHz); diagnostic thresholds • Integration: VME chassis; motion controllers; lithography tools; semiconductor test equipment; SEMI-compliant systems • Remote Access: Fault relay; LED status; Modbus RTU (optional); event log download; firmware updates via VME
5. Industrial Applications & Certifications
The ZMI-4004 is designed for semiconductor manufacturing (lithography, wafer inspection), precision metrology (coordinate measuring machines), and advanced automation (aerospace/defense) where nanometer-scale displacement feedback is critical. It complies with SEMI, CE, and UL standards, with optional ATEX Zone 2 certification for hazardous environments. The 6U VME form factor allows modular expansion to 64 axes via multiple VME chassis, with on-line module replacement minimizing downtime during repairs. It also supports laser head redundancy (7702/7712/7714/7724), ensuring measurement continuity if a laser head fails, and integrates with Zygo’s DMI ecosystem for complete metrology solutions.
• Applications: Semiconductor lithography; wafer inspection; precision CMM; aerospace metrology; advanced automation
• Certifications: SEMI; CE; UL; ATEX Zone 2 (optional); RoHS; IEC 721-3-3 Class 3C2 (optional)
• Expansion: 64-axis max via VME chassis; on-line replacement; laser head redundancy; Zygo DMI ecosystem integration
• Warranty: 12-month Zygo warranty; global technical support; repair/replacement services
6. Installation, Maintenance & Troubleshooting
Installation: 6U VME chassis mounting; laser head fiber connection; VME bus power; LED verification (Power=green).
Configuration: Zygo DMI Software for axis mapping/cyclic error reduction; data rate (10 MHz) set; diagnostic thresholds configured.
Maintenance: 6-month laser power check; 12-month cyclic error calibration; fault diagnosis via LEDs/Software.
Troubleshooting: Red Fault LED = laser/fringe/overtemp; check laser power first; verify fiber continuity; use Software for fault codes.
Replacement: On-line VME module replacement; plug-and-play with pre-saved config for minimal downtime.
YMGK Purchase Information
This section covers key details customers care about regarding purchasing, to support your global industrial product procurement needs.
One-Stop Global Industrial Product Procurement
- Global Inventory: 121 shared inventories worldwide, enabling direct procurement from overseas warehouses for faster delivery.
- Pricing & After-Sales: Competitive prices plus reliable after-sales warranty services.
- Customer Coverage: Serving clients across United States, Germany, Japan, South Korea, United Kingdom, France, Italy, Canada, Brazil, India, Australia, Russia, Spain, Netherlands, Switzerland, Sweden, Belgium, Austria, and Turkey.
- Product Quality: All items are brand new and original. Spare parts include a 1-year warranty, and all products are tested and certified.
- Discounts: Contact us for bulk-order discounts. We also offer further price adjustments if you receive lower quotes for identical products from other suppliers.
For additional inquiries, reach out to us at any time.
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Technical Documentation | Zygo ZMI-4004 | 4-Axis VME64x Displacement Measuring Interferometer Board
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