The 300mm AMAT Endura 0010-42030 Pedestal DTESC MT and 0200-02936 DTESC E-Chuck are critical components used in Applied Materials' Endura Physical Vapor Deposition (PVD) systems,

 which are widely utilized in semiconductor manufacturing for depositing thin films on 300mm wafers.

The 0010-42030 Pedestal DTESC MT (likely referring to a "Dual Temperature Electrostatic Chuck Main Body" or similar, specifically for the Endura 2 platform) serves as the base structure that supports the wafer during the deposition process. 

It's designed to precisely position the wafer and often includes heating capabilities to maintain the desired temperature.

The 0200-02936 DTESC E-Chuck (Electrostatic Chuck) is the actual component that holds the 300mm wafer in place using electrostatic force during the high-vacuum, high-temperature PVD process. 

This E-Chuck is integrated with the pedestal and is crucial for ensuring uniform heating and stable wafer positioning. 

Its "DTESC" designation indicates it likely supports dual temperature control zones, allowing for very precise and uniform temperature regulation across the wafer, 

which is essential for achieving high-quality film deposition and preventing wafer warping or damage. Together, these parts are vital for the accurate and reliable processing of semiconductor wafers in an Endura system.

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